Characterizing piezoscanner hysteresis and creep using optical levers and a reference nanopositioning stage
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چکیده
منابع مشابه
Characterizing piezoscanner hysteresis and creep using optical levers and a reference nanopositioning stage.
A method using atomic force microscope (AFM) optical levers and a reference nanopositioning stage has been developed to characterize piezoscanner hysteresis and creep. The piezoscanner is fixed on a closed-loop nanopositioning stage, both of which have the same arrangement on each axis of the three spatial directions inside the AFM-based nanomanipulation system. In order to achieve characteriza...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2009
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.3115184